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This figure shows a linear motion axis equipped with an
ironless linear motor and aerostatic bearings1) preloaded by
permanent magnets.
The slide surface is made of structural steel coated with a hard
chromium layer and is finally grinded. The circular thrust bearings of
40mm diameter are designed to carry a load up to 400N each when fed
with a supply pressure of 5 bars. The nominal film thickness amounts
3µm. The moving mass of the rotor is 2.9 kg. With the peak force of
the linear motor of 470 N the rotor accelerates with 160 m/s2. A
linear encoder is used with which the position of the stage can be
controlled within
tenths of a micrometer. |
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